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iMicro - Nanoindentor

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iMicro - Nanoindentor KLA INSTRUMENTS


The iMicro is designed for nanoscale mechanical testing, such as indentation, hardness, scratch testing and universal nanoscale testing. The interchangeable actuators on the iMicro system provide a large dynamic range of force and displacement measurements. This powers the iMicro to perform tests on a wide range of materials, from soft polymers to hard coatings and thin films. The iMicro can also perform nanomechanical measurements on small volumes of materials. Modular options can accommodate a variety of applications, such as material property maps, frequency-specific dynamic tests, and high- temperature mechanical characterization.



  • Ease of use

  • High-speed controller electronics

  • Upgradeable, extendible platform

  • Integrated microscope with digital zoom

  • Proprietary online nanoindentation courses

  • High-stiffness gantry with integrated vibration isolation

  • Fast, accurate tip calibration for high measurement accuracy

  • Large suite of pre-programmed nanomechanical test methods

  • Automated nanoindentation, hardness, scratch testing and universal testing


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