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AFM-101 / AFM-1000 / AFM-2000 Atomic Force Microscope Series
High-resolution atomic force microscopes with extremely low noise, reliable SPM performance, and highly reproducible roughness characterization for research, quality control, and semiconductor wafer analysis up to 200 mm.
Product Overview
The AFM tip scanner series combines ease of use with performance, bringing together decades of SPM application and manufacturing experience to help users achieve reliable results in the shortest possible time. The compact design delivers outstanding stability and scan rates, while the plug-and-play cantilever exchange supports fast and safe operation.
An integrated optical axis in the SPM scanner provides total visual control during approach and positioning. The AFM tip scanner supports both common and advanced SPM modes, and integrated electronics in the scan head help guarantee very low noise values in electrical SPM measurements.
This AFM series is designed for laboratories, semiconductor process development, industrial quality control, and R&D teams that require precise nanoscale surface characterization, stable scanning, and model options ranging from compact small-sample analysis to fully automated large-sample investigation.
Series Highlights
- Series ModelsAFM-101, AFM-1000, AFM-2000
- Core TechnologyAFM tip scanner for fast and reliable SPM results
- Noise PerformanceExtremely low noise for stable and reproducible measurements
- Measurement ScopeFrom small samples to semiconductor wafers up to 200 mm
- Visual PositioningIntegrated optical axis with high-resolution CCD camera options
- Scanner TypesTube scanner, planar scanner, and compatible AFM tip scanner configurations
- ControllerHigh-performance AFM controller
- SoftwareSPM2
Main Features
AFM Tip Scanner
Built around AFM tip scanner technology developed for fast, reliable, and repeatable SPM results across routine and advanced nanoscale measurement tasks.
Plug-and-Play Cantilever Exchange
Supports faster setup, simplified operation, and safe cantilever handling for users performing frequent day-to-day AFM measurements.
Visual Control During Positioning
An integrated optical axis and high-resolution CCD visual control help users monitor approach, improve sample targeting, and position scan areas accurately.
Outstanding Stability and Scan Rates
The compact AFM tip scanner design is optimized for excellent mechanical stability, minimized drift, and dependable scan performance.
Modular Platform
The AFM series supports different system sizes and automation levels, from manual compact measurements to programmable large-sample automated inspection.
Low-Noise Electrical SPM Capability
Integrated electronics in the scan head help deliver low noise values that are especially valuable in electrical SPM measurement modes.
Supported SPM Measurement Modes
Mechanical & Magnetic Modes
- AC (tapping mode) including amplitude imaging and phase imaging
- DC (contact mode) including LFM (lateral force measurement)
- MFM (magnetic force microscopy)
Electrical & Advanced Modes
- KPFM (Kelvin Probe Microscopy)
- EFM (Electric Force Microscopy)
- SCM (Scanning Capacitance Microscopy)
- STM (Scanning Tunneling Microscopy)
AFM-101 Compact Atomic Force Microscope
The AFM-101 uses an AFM tip scanner with tube-type scanner architecture and is designed for laboratories that need dependable small-sample AFM measurements in an affordable and space-efficient format.
Its scanner mount is optimized for stability and minimized drift, while the integrated CCD visual control allows exact sample positioning. The short mechanical loop and circular base/scanner-mount concept support high stability and low drift values in routine scanning work.
This model is especially suitable for research labs, education environments, and routine inspection tasks where users want strong AFM usability and repeatable nanoscale surface characterization without moving to a larger automated system.
AFM-101 Key Specifications
- Sample Size50 mm
- Sample Thickness5 mm
- XY Movement of Sample16 × 16 mm
- XY MovementManual
- AutomationNo
- CCD CameraYes, high-resolution digital CCD camera
- ScannerTube scanner
- Additional FeaturesStage base with sample table, high-precision manual XY and Z sample positioning, acoustic enclosure
AFM-1000 Atomic Force Microscope
The AFM-1000 includes an AFM tip scanner, a super rigid rail mount with manual Z sample height adjustment, and a motorized sample stage for automated measurements. Free lateral access to the sample and high-resolution digital CCD camera support make it highly practical for research and process characterization.
The system’s compact granite stage design supports easy and efficient measurements, while its versatility allows users to investigate a wide range of sample types with SPM. End users may specify which scanner type, tube or planar, is integrated into the model.
AFM-1000 Key Specifications
- Sample Size70 mm
- Sample Thickness60 mm
- XY Movement of Sample100 × 100 mm
- XY MovementMotorized
- AutomationYes
- CCD CameraYes
- ScannerTube or planar scanner
- Additional FeaturesManual Z sample height adjustment, compact granite stage, free lateral sample access
AFM-2000 Automated Atomic Force Microscope
The AFM-2000 combines an AFM tip scanner with high-precision sample positioning, full automation capability, and an optional additional optical axis. The combination with high-end optics enables automated preselection of sample sites for SPM investigation.
This model is optimized for large samples. Its long-range XY sample stage allows the investigation of a 200 mm × 250 mm area in all positions. Fully programmable sample positioning enables autonomous SPM measurements on multiple sample positions with automatic image analysis and automatic report generation.
The positioning progress is fully automated and highly stable, making the AFM-2000 especially suitable for analyzing multiple structural features on a single sample during long-term and overnight measurement runs.
AFM-2000 Key Specifications
- Sample Size200 mm
- Sample Thickness60 mm
- XY Movement of Sample200 × 250 mm
- XY MovementMotorized, with or without reference coordinate system, automated XY table control
- AutomationYes
- CCD CameraWith bright field and dark field or DIC imaging
- ScannerPlanar scanner
- Additional FeaturesAutomatic image analysis, automatic report generation, optional additional optical axis
Application Focus
Nanoscale Surface Characterization
Designed for high-resolution topography measurement, phase imaging, roughness characterization, and precise nanoscale surface investigation.
Semiconductor & Wafer Analysis
Supports quality control and reproducible roughness characterization for semiconductor wafers and advanced material surfaces, with large-area capability up to 200 mm.
Electrical SPM Investigations
Suitable for KPFM, EFM, SCM, and other low-noise electrical SPM tasks where stable electronics and reliable positioning are important.
Routine Laboratory Measurements
AFM-101 offers compact, practical AFM performance for research groups and labs that need stable day-to-day small-sample measurements.
Flexible Automated Measurements
AFM-1000 expands capability with motorized stage movement and broad sample compatibility for versatile SPM applications.
Industrial Automated Inspection
AFM-2000 is built for automated multi-position measurements, long-term runs, and industry-oriented process control and R&D workflows.
System Specifications Comparison
| Specification | AFM-101 | AFM-1000 | AFM-2000 |
|---|---|---|---|
| Sample size | 50 mm | 70 mm | 200 mm |
| Sample thickness | 5 mm | 60 mm | 60 mm |
| XY movement of sample | 16 × 16 mm | 100 × 100 mm | 200 × 250 mm |
| XY movement | manual | motorized | motorized with or without reference coordinate system, automated XY table control |
| Completely automated measurement | no | yes | yes |
| High resolution CCD camera | yes | yes | with bright and dark field or DIC imaging |
| Scanner | tube scanner | tube OR planar scanner | planar scanner |
| Controller | High-performance AFM controller | ||
| Software | SAM2 | ||
Inquiry - AFM-101/1000/2000 Atomic Force Microscopes
