PA80MET / PA120MET
A professional upright inspection microscope featuring a flexible modular design tailored for FPD, LCD, and large-scale silicon wafer inspection. German-engineered stability meets advanced APO-Plan optics for high-vibration industrial environments.
Product Overview
Technical Highlights
- Optical SystemProfessional APO-Plan
- Max Stage Travel305 mm x 305 mm
- Wafer CompatibilityUp to 12-inch (PA120)
- NosepieceMotorized Revolving
Hardware Architecture
Performance Advantages
Massive Inspection Field
Supports up to 8-inch (PA80) and 12-inch (PA120) wafers, ensuring full coverage for FPD and LCD panel inspection.
Motorized Workflow
Magnification changes are handled via high-speed motorized nosepiece, controlled through frame buttons or software.
Long-Term Reliability
German-designed stage mechanics maintain precise parallelism and reliability even after heavy industrial use.
S-APO Optical Clarity
Plan S-APO series objectives provide edge-to-edge sharpness and superior color correction for metallurgical analysis.
Industrial Applications
Wafer Inspection
Non-destructive inspection of 8-inch and 12-inch silicon wafers for semiconductor manufacturing.
FPD / LCD Analysis
High-stability observation and defect detection in large flat panel displays and liquid crystal modules.
Metallurgy
Advanced metallurgical analysis of industrial materials using reflected DIC and polarization methods.
