Atomic Solutions Sdn Bhd
33-01, Jalan Sagu 18,
Taman Daya,
81100 Johor Bahru,
Johor, Malaysia.
+6010-820 9965
+6018-989 9965
+607-362 1965
Kuala Lumpur Branch
C5-6-7, Block C, SetiaWalk,
Persiaran Wawasan,
47100 Puchong,
Selangor, Malaysia.
+6018-989 9965
+607-362 1965

Penang Branch
86-2, Lebuh Kota Permai 1,
Taman Kota Permai,
14000 Bukit Mertajam,
Penang, Malaysia.

Park NX-3DM

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Park NX-3DM PARK SYSTEMS


Description

Innovation and Efficiency for 3D Metrology. Park Systems has introduced the revolutionary Park 3DM Series, the completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements. With the patented decoupled XY and Z scanning system with tilted Z-scanner, it overcomes the challenges of the normal and flare tip methods in accurate sidewall analysis. In utilizing our True Non-Contact Mode™, the Park 3DM Series enables non-destructive measurement of soft photoresist surfaces with high aspect ratio tips.
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