SEMILAB - For All Your Metrology Needs

Description

Semilab began in 1989 when scientists from the Research Institute for Technical Physics of the Hungarian Academy of Sciences launched a spin‑off focused on semiconductor metrology. The company shipped its first DLTS-based carrier lifetime mapper by 1991. Since then, the portfolio has grown to include 47 product lines and over 214 systems serving semiconductor, solar‑cell and display‑technology markets—from handheld diagnostic tools to fully automated production controllers using advanced optical and non‑contact electrical measurement techniques. Key technology acquisitions include Sopra (ellipsometry), SSM, QC Solutions, Advanced Metrology Systems and MicroVacuum. A global team of 1,600 works together to ensure precision, innovation and support.

Semilab supplies a range of process control and measurement tools for the semiconductor, optoelectronics and photovoltaics industries worldwide: non-contact V-Q for dielectric characterization, plasma damage monitoring; SPV and uPCD for furnace contamination control, iron contamination detection, bulk wafer quality determination; TID Tool; a novel method for quantitative measurement of Cu in silicon; Bulk Microdefect Analyzer for monitoring and analysis of BMDs, DZ determination; DLTS for identification and concentration determination of impurities; non-contact resistivity determination; mapping and single point measurements; p/n conductivity type tester.

Furthermore Semilab supplies a wide range of infrared inspection equipment for controlling mechanical stress in silicon, and inspection of defects and alignment of bonded wafers. Semilab also supplies metrology equipment for the thin film and flat panel display industries.

SE-2000 Spectroscopic Ellipsometer

SE-1000 Spectroscopic Ellipsometer - Tabletop Manual System

DLS-1100 Deep Level Transient Spectrometer

PDL-1000 PARALLEL DIPOLE LINE (PDL) HALL MEASUREMENT